diff --git a/xllm/core/distributed_runtime/worker_server.cpp b/xllm/core/distributed_runtime/worker_server.cpp
index 22d10f90..8587c322 100644
--- a/xllm/core/distributed_runtime/worker_server.cpp
+++ b/xllm/core/distributed_runtime/worker_server.cpp
@@ -24,6 +24,7 @@ limitations under the License.
 #include <torch/torch.h>
 #include <unistd.h>
 
+#include <cstdlib>
 #include <memory>
 #include <optional>
 #include <utility>
@@ -50,6 +51,9 @@ limitations under the License.
 extern char** environ;
 
 namespace xllm {
+namespace {
+void handle_signal(int signum) { _exit(0); }
+}  // namespace
 
 void WorkerServer::create_server(
     const runtime::Options& options,
@@ -217,6 +221,10 @@ WorkerServer::WorkerServer(int local_worker_idx,
           local_worker_idx, master_node_addr, done, parallel_args, d, options);
       return;
     } else {
+      // worker process should handle SIGTREM and SIGINT signals.
+      signal(SIGINT, handle_signal);
+      signal(SIGTERM, handle_signal);
+
       std::unique_ptr<ForwardSharedMemoryManager> input_shm_manager = nullptr;
       std::unique_ptr<ForwardSharedMemoryManager> output_shm_manager = nullptr;
       prepare_shm(
diff --git a/xllm/core/runtime/master.cpp b/xllm/core/runtime/master.cpp
index 0ade6f56..df75c81c 100644
--- a/xllm/core/runtime/master.cpp
+++ b/xllm/core/runtime/master.cpp
@@ -45,11 +45,20 @@ limitations under the License.
 #include <pybind11/pybind11.h>
 #endif
 
+namespace brpc {
+DECLARE_bool(graceful_quit_on_sigterm);
+DECLARE_bool(graceful_quit_on_sighup);
+}  // namespace brpc
+
 namespace xllm {
 
 Master::Master(const Options& options, EngineType type) : options_(options) {
   LOG(INFO) << "Master init options: " << options.to_string();
 
+  // Allow brpc receive SIGTREM and SIGINT signal.
+  brpc::FLAGS_graceful_quit_on_sigterm = true;
+  brpc::FLAGS_graceful_quit_on_sighup = true;
+
 #if defined(USE_NPU)
   if (options.rank_tablefile().has_value()) {
     FLAGS_rank_tablefile = options.rank_tablefile().value();
diff --git a/xllm/core/runtime/vlm_engine.cpp b/xllm/core/runtime/vlm_engine.cpp
old mode 100755
new mode 100644
index 3a75a180..74706cd3
--- a/xllm/core/runtime/vlm_engine.cpp
+++ b/xllm/core/runtime/vlm_engine.cpp
@@ -21,6 +21,7 @@ limitations under the License.
 
 #include <algorithm>
 #include <boost/algorithm/string.hpp>
+#include <cstdlib>
 #include <memory>
 
 #include "common/metrics.h"
@@ -33,7 +34,16 @@ limitations under the License.
 
 namespace xllm {
 
+namespace {
+void handle_signal(int signum) { _exit(0); }
+}  // namespace
+
 VLMEngine::VLMEngine(const runtime::Options& options) : options_(options) {
+  // worker process should handle SIGTREM and SIGINT signals.
+  // TODO: delete these code when multi-process impl is supported.
+  signal(SIGINT, handle_signal);
+  signal(SIGTERM, handle_signal);
+
   const auto& devices = options_.devices();
   CHECK_GT(devices.size(), 0) << "At least one device is required";
 
diff --git a/xllm/pybind/embedding.py b/xllm/pybind/embedding.py
index 77de11fb..85bfba5a 100644
--- a/xllm/pybind/embedding.py
+++ b/xllm/pybind/embedding.py
@@ -34,6 +34,9 @@ def __init__(
         is_local: bool = True,
         **kwargs,
     ) -> None:
+        signal.signal(signal.SIGTERM, lambda s, f: sys.exit(0))
+        signal.signal(signal.SIGINT, lambda s, f: sys.exit(0))
+
         if not os.path.exists(model):
             raise ValueError(f"model {model} not exists")
 
@@ -79,7 +82,8 @@ def __init__(
     def finish(self):
         try:
             #os.kill(os.getpid(), signal.SIGTERM)
-            os.kill(os.getpid(), signal.SIGKILL)
+            #os.kill(os.getpid(), signal.SIGKILL)
+            util.terminate_process(os.getpid())
         except Exception as e:
             pass
 
diff --git a/xllm/pybind/llm.py b/xllm/pybind/llm.py
index d20bc83e..efe874dd 100644
--- a/xllm/pybind/llm.py
+++ b/xllm/pybind/llm.py
@@ -47,6 +47,8 @@ def __init__(
         is_local: bool = True,
         **kwargs,
     ) -> None:
+        signal.signal(signal.SIGTERM, lambda s, f: sys.exit(0))
+        signal.signal(signal.SIGINT, lambda s, f: sys.exit(0))
 
         if not os.path.exists(model):
             raise ValueError(f"model {model} not exists")
@@ -102,7 +104,8 @@ def __init__(
     def finish(self):
         try:
             #os.kill(os.getpid(), signal.SIGTERM)
-            os.kill(os.getpid(), signal.SIGKILL)
+            #os.kill(os.getpid(), signal.SIGKILL)
+            util.terminate_process(os.getpid())
         except Exception as e:
             pass
 
diff --git a/xllm/pybind/util.py b/xllm/pybind/util.py
index 36c29f2d..3f857c95 100644
--- a/xllm/pybind/util.py
+++ b/xllm/pybind/util.py
@@ -1,4 +1,30 @@
+import os
+import psutil
+import signal
 import socket
+import sys
+
+def terminate_process(pid, timeout=30):
+    try:
+        parent = psutil.Process(pid)
+    except psutil.NoSuchProcess:
+        return
+
+    children = parent.children(recursive=True)
+    procs = children + [parent]
+
+    for p in procs:
+        try:
+            p.terminate()
+        except psutil.NoSuchProcess:
+            pass
+
+    gone, alive = psutil.wait_procs(procs, timeout=timeout)
+    for p in alive:
+        try:
+            p.kill()
+        except psutil.NoSuchProcess:
+            pass
 
 def get_free_port():
     with socket.socket(socket.AF_INET, socket.SOCK_STREAM) as s:
diff --git a/xllm/pybind/vlm.py b/xllm/pybind/vlm.py
index aa5f0628..a32ed6fc 100644
--- a/xllm/pybind/vlm.py
+++ b/xllm/pybind/vlm.py
@@ -45,6 +45,8 @@ def __init__(
         is_local: bool = True,
         **kwargs,
     ) -> None:
+        signal.signal(signal.SIGTERM, lambda s, f: sys.exit(0))
+        signal.signal(signal.SIGINT, lambda s, f: sys.exit(0))
 
         if not os.path.exists(model):
             raise ValueError(f"model {model} not exists")
@@ -97,7 +99,8 @@ def __init__(
     def finish(self):
         try:
             #os.kill(os.getpid(), signal.SIGTERM)
-            os.kill(os.getpid(), signal.SIGKILL)
+            #os.kill(os.getpid(), signal.SIGKILL)
+            util.terminate_process(os.getpid())
         except Exception as e:
             pass